Search Results - walajabad+sampath

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Process and Hardware for Deposition of Complex Thin-film Alloys over Large Areas
An instrument and method for depositing thin film alloys over large areas under vacuum. The key features stem from the use of close-space sublimation sources with independent valve and temperature control.At a GlanceThin film deposition of complex alloys onto large area substratesScalable, fast, and able to deposit alloyed films of graded composition...
Published: 11/8/2018   |   Inventor(s): Walajabad Sampath, Pavel Kobyakov, Kevin Walters, Davis Hemenway
Keywords(s):  
Category(s): Chemicals & Materials, Electronic Devices & Instrumentation, Energy & Natural Resources
Apparatus and Method for Rapid Cooling of Large Area Substrates in Vacuum
This innovation facilitates rapid cooling in a vacuum (from 200 oC to 25 oC) and greatly diminishes the time required to produce complex thin films requiring multiple deposition steps.At a GlanceReduces cooling time of a substrate in vacuum from hours to just a few minutesDecreases device fabrication timeIncreases throughput rate and overall manufacturing...
Published: 11/8/2018   |   Inventor(s): Kurt Barth, Robert Enzenroth, Walajabad Sampath
Keywords(s):  
Category(s): Chemicals & Materials, Energy & Natural Resources, Electronic Devices & Instrumentation