Search Results - robert+enzenroth

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System and Method for Sealing a Vapor Deposition Source An apparatus for sealing a deposition chamber from the rest of a fabrication system under vacuum.At a GlanceSystem for movably sealing a deposition chamber within a larger system under vacuumCompensates for the gap between substrate transport and deposition sourceReduces leakage of material from deposition chamber to other surfaces within vacuum systemDecreases... Published: 4/4/2019   |   Inventor(s): Robert Enzenroth Keywords(s):   Category(s): Chemicals & Materials, Energy & Natural Resources, Electronic Devices & Instrumentation

Apparatus and Method for Rapid Cooling of Large Area Substrates in Vacuum This innovation facilitates rapid cooling in a vacuum (from 200 oC to 25 oC) and greatly diminishes the time required to produce complex thin films requiring multiple deposition steps.At a GlanceReduces cooling time of a substrate in vacuum from hours to just a few minutesDecreases device fabrication timeIncreases throughput rate and overall manufacturing... Published: 11/8/2018   |   Inventor(s): Kurt Barth, Robert Enzenroth, Walajabad Sampath Keywords(s):   Category(s): Chemicals & Materials, Energy & Natural Resources, Electronic Devices & Instrumentation