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Process and Hardware for Deposition of Complex Thin-film Alloys over Large Areas
An instrument and method for depositing thin film alloys over large areas under vacuum. The key features stem from the use of close-space sublimation sources with independent valve and temperature control.At a GlanceThin film deposition of complex alloys onto large area substratesScalable, fast, and able to deposit alloyed films of graded composition...
Published: 11/8/2018
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Inventor(s): Walajabad Sampath, Pavel Kobyakov, Kevin Walters, Davis Hemenway
Keywords(s):
Category(s): Chemicals & Materials, Electronic Devices & Instrumentation, Energy & Natural Resources
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